EPX500LE
Type:
Pumps
Manufacturer:
Edwards
Pumping speed:
500 m3h-1
Vacuum depth:
1.0E-6 mbar
Category:
Turbo molecular pump
Peak speed 500 m3h-1
295 ft3min-1
8338 lmin-1
Ultimate vacuum
<1 x 10-6 mbar
<7,5 x 10-7 Torr
<1 x 10-4 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO160
Outlet flange NW25
Noise <59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 – 35 °C
Electrical Supply 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1,4 kW
Rated motor power 3,0 kW
TIM C3
Weight 45,2 kg