EPX180LE
Type:
Pumps
Manufacturer:
Edwards
Pumping speed:
170 m3h-1
Vacuum depth:
0.0001 mbar
Category:
Turbo molecular pump
Peak speed 170 m3h-1
105 ft3min-1
2835 lmin-1
Ultimate vacuum
<1 x 104 mbar
<7,5 x 10-5 Torr
<1 x 10-2 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO63
Outlet flange NW25
Noise <59 dB(A)
Water connectors 3/8 in Quick
Minimum cooling water flow rate 2 lm-1
Cooling water temperature 15 – 35 °C
Electrical Supply 200/208 V, 50/60 Hz 3 phase
Power at ultimate 1,4 kW
Rated motor power 3,0 kW
TIM None
Weight 43,5 kg